| 000 | 00354nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 191201s1990 xx 000 0 und d | ||
| 082 |
_a621.381 _bCRM |
||
| 100 | _aCRAIEVICH, Aldo | ||
| 245 | 0 | _aMicrolithography: High Integration In Microelectronics | |
| 260 |
_aSingapore _bWorld Scientific _c1990 |
||
| 300 | _a184 | ||
| 650 | _aApplied | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c676 _d676 |
||